Home   Literature   About Us   Contact Us
arrow ISO 9001:2000
Equipment
Search
 Search button
arrow Advanced Search
Equipment
The Equipment division designs and manufactures value-added, application specific products.



Ultra High Purity Panels
Spectra Gases F1600 Series (PDF).
  • Spectra Gases 1600 / 1601 Series Gas Delivery Combination Purge / Fill is designed for use with high purity inert gases. The F1600 panel provides the user with an inert purge panel configuration (lower regulator assembly) along with a rare gas buffer assembly mounted on the same panel.

Spectra Gases F1700 Series (PDF).
  • Spectra Gases 1710 Series Gas Delivery Purge Panel is
    designed for use with inert gases in ultra high purity (UHP) applications. This panel offers a three valve configuration which includes a low pressure vent valve. The 1710 Series panel is constructed with all stainless steel components using orbital welded construction and VCR style fittings.

Spectra Gases F1900 Series (PDF).
  • Spectra Gases F1900 Series Gas Delivery Process is designed for use with corrosive gases in ultra high purity (UHP) applications.  Construction is fully welded, face seal fittings for optimal leak integrity.  Optional configurations may include pressure transducers, excess flow switches and vacuum venturi to ensure a more efficient purge process.

 


See Also

Related Equipment
arrow  Recovery Systems
arrow 
arrow 
Related Content
arrow Excimer Lasers
arrow Lithography
arrow

Excimer Laser Panel


Spectra Gases has designed gas delivery systems specific to the excimer laser industry which provide the excimer laser user with long service life and peak performance.

Did You Know...
...Spectra develops and manufactures the most unique semiconductor materials available anywhere in the world?
arrow  Learn more