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The Equipment division designs and manufactures value-added, application specific products.



High Purity Panels
Spectra Gases F1100 Series (PDF).
  • Spectra Gases F1100 series gas delivery process
    panels are designed for use in High Purity systems
    where corrosive and toxic gas levels reach 20% of
    the mixture.

Spectra Gases F1200 Series (PDF).
  • Spectra Gases F1200 series gas fill panels are
    designed for use in High Purity systems where inert
    gases are introduced as a buffer

Spectra Gases F1300 Series (PDF).
  • Spectra Gases F1300 series gas purge panels are
    designed for use in High Purity systems where an
    inert gas is required to purge the process panel as
    well as the process equipment.

Spectra Gases F1400 Series (PDF).
  • Spectra Gases 1400 / 1401 series gas delivery combination purge/fill is designed for use with inert gases in High Purity. The F1400 panel provides the user with an inert purge panel configuration (lower regulator assembly)
    along with a rare gas buffer assembly mounted on the
    same panel.

 


See Also

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arrow Excimer Lasers
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Excimer Laser Panel


Spectra Gases has designed gas delivery systems specific to the excimer laser industry which provide the excimer laser user with long service life and peak performance.

Did You Know...
...Spectra develops and manufactures the most unique semiconductor materials available anywhere in the world?
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