Home   Literature   About Us   Contact Us
arrow ISO 9001:2008
Equipment
Search
 Search button
arrow Advanced Search
Equipment
The Equipment division designs and manufactures value-added, application specific products.



Gas Scrubbers
Gas Scrubbers F5100 Series (PDF).
  • The Series F5100 Halogen Gas Scrubbers use activated alumina or activated charcoal to scrub the user’s vent gases. These scrubbers can be used in a stand alone configuration or inside a vented cylinder cabinet. Excimer laser processes and light bulb manufacturing are typical applications for these units. An optional excess flow switch can be assembled at the inlet of the scrubber to prevent a sudden flow surge into the scrubber media.
Gas Scrubbers F5200 Series (PDF).
  • The F5200 Series Ventilation Scrubber is designed to scrub the end user’s vent gases. The scrubber consists of a special activated carbon adsorber and a fiberglass pre-filter placed just upstream of the adsorber for removal of dirt and dust contaminants. Both the adsorber and pre-filter are enclosed together in a steel housing within the scrubber.
Gas Scrubbers F5300 Series (PDF).
  • Spectra Gases F5300 Series Room Air Purifier is designed to scrub the toxic exhaust gas in a 3000 cubic foot (85 cubic meter) room or the toxic exhaust gas that leaves the Model 4007 gas cabinet through the six inch flue. The room air purifier is designed to meet UL and NEC electrical codes. The room air purifier includes replaceable filter elements with an activated charcoal bed for fluorine gas and fluorine compound removal, a 1,000 CFM centrifugal blower rated at 20,000 hours of continuous operation, remote control and safety interlock interfacing, and is housed in an all white, gas tight cabinet enclosure.
 


See Also

Related Equipment
arrow  Recovery Systems
arrow 
arrow 
Related Content
arrow Excimer Lasers
arrow Lithography
arrow

Excimer Laser Panel


Spectra Gases has designed gas delivery systems specific to the excimer laser industry which provide the excimer laser user with long service life and peak performance.

Did You Know...
...Spectra develops and manufactures the most unique semiconductor materials available anywhere in the world?
arrow  Learn more