An excimer laser is a multi-gas mixture, dedicated to the generation and /or production of a single wavelength. In order to achieve maximum safety, improve reproducibility, and guarantee optimum laser performance, the use of a premix has become a laser industry standard.

• Very low percentages of toxic, corrosive halogen gases.
• Precise gas mixtures analyzed and guaranteed to each manufacturer's specifications.
• Minimal space requirements.
• Lowered cylinder costs: shipping, storage, rental.
• Fewer gas lines and gas handling equipment.
• Superior reproducibility.

The term "Excimer" refers to the rare gas / halide molecule. There are four wavelengths (spectral lines) that can be generated from Fluorine laser gas mixtures and two generated from Hydrogen Chloride laser gas mixtures.